Floating Vacuum Chuck
Aluminum Orifice Floating / Vacuum Chuck
- Size : 700*700*40T
- Flatness : 47um (Max. 30um)
- Grooving & Hole
- ESD Hard Black Anodizing(10^6~10^9)
Granite Vacuum Chuck
- Size : 865*772*55T
- Flatness : 8.6um
- Grooving & Hole