Mecha. System Solution

Vac. Chamber
Vac. Chamber

- Vac. Pressure : 1.0E-6 Torr
Vac. Dry Oven
Vac. Dry Oven

- Vac. Pressure : 1.0E-3 Torr <br />- R.O.R≤ 0.1mTorr/Min(10min)
8.6G N2 Chamber
8.6G N2 Chamber

- ≤ 0.5 mbar wihile 30 min
8.6G N2 Chamber
8.6G N2 Chamber

- ≤ 0.5 mbar wihile 30 min
Utility 배관
Utility 배관

- N2, CDA, V/C, PCW S&amp;R
Ink Supply Box(PAF 배관)
Ink Supply Box(PAF 배관)

Canister , Ink Supply / 탈기 System
공압 Utility
공압 Utility

- N2, CDA 공압품
PCW, N2, CDA 배관
PCW, N2, CDA 배관

- SUS 배관